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Towards a monolithic process for open-access Fabry-Perot etalon cavities

  • Author / Creator
    Maldaner, James B
  • This thesis describes the design, fabrication, morphological overview, optical characterization, and fluid infiltration of ‘open-access’, small mode-volume, and high quality-factor Fabry-Perot micro-cavities in the telecommunication range followed by the simulation of a-Si:H/SiO2-based Bragg mirrors for submicron range devices. First, we describe a monolithic approach to fabricating large-scale arrays of high-finesse and low-mode-volume Fabry-Perot microcavities with open access to the air-core. A stress-driven buckling self-assembly technique was used to form half-symmetric curved-mirror cavities, and a dry etching process was subsequently used to create micro-pores through the upper mirror. We show that the cavities retain excellent optical properties, with reflectance-limited finesse ∼2000 and highly predictable Laguerre-Gaussian modes. We furthermore demonstrate the ability to introduce liquids into the cavity region by micro-injection through the pores. Secondly, we conducted a theoretical study on the potential use of amorphous hydrogenated silicon (a-Si:H) as the high-index material in quarterwave-stack Bragg mirrors for cavity QED applications. Compared to conventionally employed Ta2O5, a-Si:H provides a much higher index contrast with SiO2, thus promising significantly reduced layer-number requirements and a smaller mode volume. Silicon-based mirrors offer the additional advantage of providing a wide omnidirectional reflection band, which allows greater control of the background electromagnetic modes. From numerical studies at 850 nm, iiwe show that a-Si:H-based mirrors could enable significant improvements with respect to a Fabry-Perot cavity’s maximum Purcell factor, cooperativity, and spontaneous emission coupling factor, and in addition, potentially reduced fabrication complexity. These advantages are anticipated to be even more compelling at longer wavelengths. Applications in sensing, optofluidics, and cavity quantum electrodynamics are envisioned.

  • Subjects / Keywords
  • Graduation date
    Fall 2020
  • Type of Item
    Thesis
  • Degree
    Master of Science
  • DOI
    https://doi.org/10.7939/r3-h4te-r355
  • License
    Permission is hereby granted to the University of Alberta Libraries to reproduce single copies of this thesis and to lend or sell such copies for private, scholarly or scientific research purposes only. Where the thesis is converted to, or otherwise made available in digital form, the University of Alberta will advise potential users of the thesis of these terms. The author reserves all other publication and other rights in association with the copyright in the thesis and, except as herein before provided, neither the thesis nor any substantial portion thereof may be printed or otherwise reproduced in any material form whatsoever without the author's prior written permission.